The packages enable convenient vacuum control in the fine vacuum range from 5 mbar down to 10-3 mbar and consist of a VACUU·SELECT vacuum controller, a VSP 3000 vacuum sensor, VV-B 15C solenoid-operated valve and all necessary small flange components. Measurement principle: Thermal conductivity (Pirani), chemically resistant plastics/ceramics.
Measured range:
0.001 ... 1,000 mbar
Accuracy:
±15 % of indicated value in the range 0.01 ... 5 mbar